Film resistivity measurements (4 point probe)
Current =
uA
mA
Voltage A =
mV
uV
V
Voltage B =
Average Voltage =
Film Thickness =
nm
um
mm
Probe Spacing =
40 mil
50 mil
62.5 mil
=
mm
Geometric coefficient =
(corrected =
)
Sheet Resistance =
(Corrected:
)
Film Resistivity =
(Corrected =
)
___________________________________
Voltage A and B are measured with voltage leads swapped.
Geometric coefficient:
c = PI/ln(2)
Correction to the geometric coefficient is necessary when t>s/2.
c = PI/ln(sinh(t/s)/sinh(t/2*s))
More info:
here
and
here
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