Measure overlayer film thickness and composition with Auger electron spectroscopy
Default values for overlayer: Au (69 eV)
Default values for substrate: Si (92 eV)
Notes:
Rinf: Ratio of intensities for overlayer and substrate each measured for bulk materials (not a film over a substrate).
Computation of compositions:
compOv = (OverI/SxOv)/((OverI/SxOv)+(SubI/SxSub));
compSub = (SubI/SxSub)/((OverI/SxOv)+(SubI/SxSub));
Computation of overlayer thickness:
D. Tian et al. Phys. Rev. B 45 (1992), 3749
P.J. Cumpson et al. Surf. and Interface Analysis 29 (2000), 403-406
S. Geng et al. Mat. Scie. Forum 437-438 (2003), 195-198
To compute the inelastic mean free path:
IMFP
or QUASES_IMFP_TPP2M
main