Compute inelastic mean free path of electron scattering
Material =
Si
4H-SiC
6H-SiC
Graphite
Diamond
Ag
Al
Au
Cr
Cu
Ge
Ir
Mo
Ni
Pd
Pt
Ru
Ti
W
Al2O3
GaAs
GaP
GeO2
SiO2
Si3N4
TiO2
Bandgap (eV) =
Atomic weight =
# Valence electrons =
Density ro (g/cm
3
) =
Energy (eV) =
Reference: S. Tanuma, C. J. Powell, D. R. Penn: Surf. Interf. Anal.,Vol. 21, 165 (1993)
main